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نویسنده
چکیده
In this paper, we present a nucromachmed diaphragm structure for integrated ultrasound transducers Tlus structure greatly reduces the parasltlc capacitance between the lower electrode and the conductive Sl substrate m a nommcromachmed structure The rmcromachlmng lmproves both senslfinty and nummum detectable signal It also reduces crosstalk between transducer elements
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